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UV Debonding Machine

12 inch Wafer UVLED Debonding Module

UV LED wavelength: 365nm
Active area: 310mm*310mm
Control system: 4.3-inch HMI touch interface Intuitive
Energy control range: 10%~100%

Optical output power: >200mW/cm2
Debonding treatment time: 2-3 seconds
Full voltage output (AC 110/220 V)
Self-contained fan air intake
Temperature self-protection device
Can be connected to PLC for control
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specification

UV LED wavelength: 365nm
Active area: 310mm*310mm
Control system: 4.3-inch HMI touch interface Intuitive
Energy control range: 10%~100%

Optical output power: >200mW/cm2
Debonding treatment time: 2-3 seconds
Full voltage output (AC 110/220 V)
Self-contained fan air intake
Temperature self-protection device
Can be connected to PLC for control